基管内表面的活化方法以及光纤预制件和光纤及制造方法

Method for activating an inner surface of a substrate tube and method for the manufacturing of an optical-fiber preform and fiber

Abstract

The invention relates to a method for activating an inner surface of a substrate tube and a method for the manufacturing of an optical-fiber preform and fiber. A method activates the inner surface of a substrate tube for manufacturing an optical-fiber preform via plasma etching with a fluorine-containing etching gas. An exemplary method includes the steps of supplying a supply flow of gas to the cental cavity of a substrate tube, wherein the supply flow includes a main gas flow and a fluorine-containing etching gas flow, inducing a plasma via electromagnetic radiation into at least a part of the substrate tube to create a plasma zone within the substrate tube's central cavity, and longitudinally reciprocating the plasma zone over the length of the substrate tube between a reversal point near the supply side and a reversal point near the discharge side of the substrate tube, wherein the reciprocating is called a stroke. The flow of the fluorine-containing etching gas is typically provided when the plasma zone is located reversal point near the supply side and at a predetermined axial position between reversal point near the supply side and reversal point near the discharge side.
本发明涉及基管内表面的活化方法以及光纤预制件和光纤及制造方法。通过利用含氟蚀刻气体的等离子体蚀刻来使制造光纤预制件所用的基管的内表面活化的方法,等离子体蚀刻包括:将气体的供给流供给至基管的中央空腔,供给流包括主气体流和含氟蚀刻气体流;利用电磁辐射将等离子体引入基管的至少一部分中以在基管的中央空腔中创建等离子体区域;使等离子体区域沿纵向在基管的位于基管的供给侧附近的换向点和位于排出侧附近的换向点之间的长度上来回移动,其中各次来回移动被称为行程,在等离子体区域存在于供给侧附近的换向点与位于供给侧附近的换向点和排出侧附近的换向点之间的预先确定的轴向位置之间时,提供含氟蚀刻气体流。

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